Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510625 | Systems and methods for controlling plasma instability in semiconductor fabrication | Yukinori Sakiyama, Douglas Keil | 2019-12-17 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang +6 more | 2019-08-13 |
| 10378109 | Diagnostic and control systems and methods for substrate processing systems using DC self-bias voltage | Douglas Keil | 2019-08-13 |
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Karl Leeser | 2019-05-14 |
| 10224182 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Karl Leeser, Mohamed Sabri | 2019-03-05 |
| 10187032 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Yaswanth Rangineni | 2019-01-22 |