Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10373805 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2019-08-06 |
| 10304663 | RF generator for generating a modulated frequency or an inter-modulated frequency | Thomas Frederick | 2019-05-28 |
| 10187032 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2019-01-22 |