Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515783 | Flow through line charge volume | — | 2019-12-24 |
| 10400333 | Hybrid ceramic showerhead | Mohamed Sabri, Ramkishan Rao Lingampalli | 2019-09-03 |
| 10373805 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2019-08-06 |
| 10354909 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2019-07-16 |
| 10345802 | Common terminal heater for ceramic pedestals used in semiconductor fabrication | — | 2019-07-09 |
| 10312119 | Line charge volume with integrated pressure measurement | — | 2019-06-04 |
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak | 2019-05-14 |
| 10253412 | Deposition apparatus including edge plenum showerhead assembly | Timothy Scott Thomas | 2019-04-09 |
| 10224182 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2019-03-05 |
| 10173193 | Ammonia radical generator | Mohamed Sabri | 2019-01-08 |