Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak, Karl Leeser | 2019-05-14 |
| 10232413 | Controlled fluid flow for cleaning an optical element | Silvia De Dea, Gregory J. Wilson, Brandon Wilson Verhoff | 2019-03-19 |