| 10494731 |
Electroplating dynamic edge control |
Paul R. McHugh, Daniel J. Woodruff, Marvin L. Bernt |
2019-12-03 |
| 10364506 |
Electroplating apparatus with current crowding adapted contact ring seal and thief electrode |
Paul R. McHugh |
2019-07-30 |
| 10240248 |
Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control |
Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Kyle M. Hanson +1 more |
2019-03-26 |
| 10232413 |
Controlled fluid flow for cleaning an optical element |
Silvia De Dea, Chunguang Xia, Brandon Wilson Verhoff |
2019-03-19 |
| 10227707 |
Inert anode electroplating processor and replenisher |
Paul R. McHugh, John L. Klocke |
2019-03-12 |
| 10227706 |
Electroplating apparatus with electrolyte agitation |
Paul R. McHugh |
2019-03-12 |
| 10191379 |
Removing photoresist from a wafer |
Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Eric J. Bergman, Stuart Crane |
2019-01-29 |
