Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401742 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2019-09-03 |
| 10240248 | Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control | Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Gregory J. Wilson +1 more | 2019-03-26 |
| 10191379 | Removing photoresist from a wafer | Paul R. McHugh, John L. Klocke, Eric J. Bergman, Stuart Crane, Gregory J. Wilson | 2019-01-29 |