Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494731 | Electroplating dynamic edge control | Paul R. McHugh, Gregory J. Wilson, Marvin L. Bernt | 2019-12-03 |
| 10474033 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-11-12 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Edward W. Budiarto, Robert O. Miller, Abraham Ravid, Bridger Earl HOERNER +1 more | 2019-04-16 |
| 10203604 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-02-12 |