Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510625 | Systems and methods for controlling plasma instability in semiconductor fabrication | Yukinori Sakiyama, Edward Augustyniak | 2019-12-17 |
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Pramod Subramonium, Chunhai Ji +1 more | 2019-11-12 |
| 10378109 | Diagnostic and control systems and methods for substrate processing systems using DC self-bias voltage | Edward Augustyniak | 2019-08-13 |
| 10287683 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Edward Augustyniak, Karl Leeser | 2019-05-14 |
| 10224182 | Mechanical suppression of parasitic plasma in substrate processing chamber | Edward Augustyniak, Karl Leeser, Mohamed Sabri | 2019-03-05 |