Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Yukinori Sakiyama, Bin Luo, Douglas Keil, Pramod Subramonium, Chunhai Ji +1 more | 2019-11-12 |