Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510625 | Systems and methods for controlling plasma instability in semiconductor fabrication | Edward Augustyniak, Douglas Keil | 2019-12-17 |
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Bin Luo, Douglas Keil, Pramod Subramonium, Chunhai Ji +1 more | 2019-11-12 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang +6 more | 2019-08-13 |
| 10301718 | Asymmetric pedestal/carrier ring arrangement for edge impedance modulation | Ryan Blaquiere, Ramesh Chandrasekharan, Shankar Swaminathan | 2019-05-28 |