Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403474 | Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system | Richard Phillips, Shankar Swaminathan | 2019-09-03 |
| 10301718 | Asymmetric pedestal/carrier ring arrangement for edge impedance modulation | Ramesh Chandrasekharan, Shankar Swaminathan, Yukinori Sakiyama | 2019-05-28 |