Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431467 | Module including metallized ceramic tubes for RF and gas delivery | Joel Hollingsworth, Bradley J. Baker | 2019-10-01 |
| 10400333 | Hybrid ceramic showerhead | Mohamed Sabri, Karl Leeser | 2019-09-03 |
| 10217614 | Ceramic gas distribution plate with embedded electrode | Jeremy Tucker, Tony Kaushal | 2019-02-26 |