Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10340136 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Douglas Walter Agnew | 2019-07-02 |
| 10202691 | Showerhead curtain gas method and system for film profile modulation | Adrien LaVoie | 2019-02-12 |