Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388547 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice | 2019-08-20 |
| 10312127 | Compliant robot blade for defect reduction | Steven V. Sansoni, Glen T. Mori | 2019-06-04 |