Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453657 | Apparatus for depositing metal films with plasma treatment | Daping Yao, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2019-10-22 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2019-06-18 |