Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, David Robert Evans | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, David Robert Evans | 2019-07-23 |