Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510518 | Methods of dry stripping boron-carbon films | Kwangduk Douglas Lee, Sudha Rathi, Martin Jay Seamons, Irfan Jamil, Bok Hoen Kim | 2019-12-17 |
| 10497606 | Dual-zone heater for plasma processing | Xing Lin, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2019-12-03 |
| 10450653 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez, Zheng John Ye, Jianhua Zhou | 2019-10-22 |
| 10385448 | Apparatus and method for purging gaseous compounds | Juan Carlos Rocha-Alvarez, Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou | 2019-08-20 |
| 10370764 | Isolator for a substrate processing chamber | — | 2019-08-06 |
| 10290459 | Magnetron having enhanced cooling characteristics | Govinda Raj, Simon Yavelberg | 2019-05-14 |