Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515843 | Amalgamated cover ring | Hanish Kumar Panavalappil Kumarankutty, Stanley Wu | 2019-12-24 |
| 10290459 | Magnetron having enhanced cooling characteristics | Simon Yavelberg, Ramprakash Sankarakrishnan | 2019-05-14 |
| 10190701 | Corrosion control for chamber components | Hanish Kumar, Lin Zhang, Stanley Wu | 2019-01-29 |
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Daniel L. Martin, Robert T. Hirahara, Ashish Bhatnagar, Bopanna Vasanth, Prashanth Rao +1 more | 2019-01-08 |
| 10168229 | EMI/RF shielding of thermocouples | Bopanna Ichettria Vasantha, Ashish Bhatnagar, Cariappa Baduvamanda | 2019-01-01 |