Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347522 | Method to remove residual charge on a electrostatic chuck during the de-chucking step | Wendell Glen Boyd, Jr., Tom K. Cho | 2019-07-09 |
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Ashish Bhatnagar, Bopanna Vasanth, Prashanth Rao +1 more | 2019-01-08 |