Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Robert T. Hirahara, Ashish Bhatnagar, Bopanna Vasanth +1 more | 2019-01-08 |