Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |
| 10246772 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Praket P. Jha, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim, Byung Ho Kil +2 more | 2019-04-02 |