Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510589 | Cyclic conformal deposition/anneal/etch for Si gapfill | Rui Cheng, Abhijit Basu Mallick | 2019-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510589 | Cyclic conformal deposition/anneal/etch for Si gapfill | Rui Cheng, Abhijit Basu Mallick | 2019-12-17 |