Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487401 | Diffuser temperature control | Shinichi Kurita | 2019-11-26 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Jinhyun CHO, Jiarui Wang +1 more | 2019-11-05 |
| 10373809 | Grooved backing plate for standing wave compensation | Shinichi Kurita | 2019-08-06 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10280510 | Substrate support assembly with non-uniform gas flow clearance | Shinichi Kurita | 2019-05-07 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |