Issued Patents 2019
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487401 | Diffuser temperature control | Robin L. Tiner | 2019-11-26 |
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, John M. White, Suhail Anwar, Makoto Inagawa | 2019-10-22 |
| 10373809 | Grooved backing plate for standing wave compensation | Robin L. Tiner | 2019-08-06 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10304761 | Semiconductor device and alternator using same | Kenya Kawano, Tetsuya Ishimaru, Takeshi TERAKAWA | 2019-05-28 |
| 10280510 | Substrate support assembly with non-uniform gas flow clearance | Robin L. Tiner | 2019-05-07 |
| 10265868 | Transfer robot with substrate cooling | Makoto Inagawa, Takayuki Matsumoto | 2019-04-23 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |
| 10205314 | Rectifier including MOSFET and hold circuit that boosts gate voltage of MOSFET, and alternator using the same | Tetsuya Ishimaru, Mutsuhiro Mori | 2019-02-12 |
| 10184179 | Atomic layer deposition processing chamber permitting low-pressure tool replacement | Jozef Kudela, John M. White, Dieter Haas | 2019-01-22 |