Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, Shinichi Kurita, John M. White, Suhail Anwar | 2019-10-22 |
| 10294559 | Target cooling through gun drilled holes | Yoshiaki Tanase, Akihiro Hosokawa | 2019-05-21 |
| 10265868 | Transfer robot with substrate cooling | Shinichi Kurita, Takayuki Matsumoto | 2019-04-23 |