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Shadow frame with sides having a varied profile for improved deposition uniformity |
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Slit valve door with moving mating part |
Mehran Behdjat, Shinichi Kurita, John M. White, Makoto Inagawa |
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| 10312058 |
Plasma uniformity control by gas diffuser hole design |
Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more |
2019-06-04 |
| 10312475 |
CVD thin film stress control method for display application |
Tae Kyung Won, Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Chien-Teh Kao +1 more |
2019-06-04 |
| 10262837 |
Plasma uniformity control by gas diffuser hole design |
Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more |
2019-04-16 |
