Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Shinichi Kurita +4 more | 2019-06-04 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Shinichi Kurita +4 more | 2019-04-16 |