Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483465 | Methods of operating a deposition apparatus, and deposition apparatus | Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Andreas Lopp, Harald WURSTER | 2019-11-19 |
| 10184179 | Atomic layer deposition processing chamber permitting low-pressure tool replacement | Shinichi Kurita, Jozef Kudela, John M. White | 2019-01-22 |