Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483465 | Methods of operating a deposition apparatus, and deposition apparatus | Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Harald WURSTER, Dieter Haas | 2019-11-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483465 | Methods of operating a deposition apparatus, and deposition apparatus | Jose Manuel DIEGUEZ-CAMPO, Stefan Bangert, Harald WURSTER, Dieter Haas | 2019-11-19 |