Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304607 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Carl A. Sorensen, John M. White | 2019-05-28 |
| 10184179 | Atomic layer deposition processing chamber permitting low-pressure tool replacement | Shinichi Kurita, John M. White, Dieter Haas | 2019-01-22 |