SC

Shengwu Chang

VA Varian Semiconductor Equipment Associates: 2 patents #30 of 161Top 20%
🗺 Massachusetts: #2,694 of 14,267 inventorsTop 20%
Overall (2019): #121,724 of 560,194Top 25%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10504682 Conductive beam optic containing internal heating element Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg, Eric D. Hermanson 2019-12-10
10468224 Apparatus and method for controlling ion beam properties using energy filter Svetlana B. Radovanov, Ana Samolov, Frank Sinclair, Peter L. Kellerman 2019-11-05