Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428426 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Ying Ma, Dongqing Li, Jay D. Pinson, II | 2019-10-01 |