| 9853579 |
Rotatable heated electrostatic chuck |
Anantha K. Subramani, Ashish Goel, Wei Wang, Bharath Swaminathan, Xiaoxiong Yuan |
2017-12-26 |
| 9831111 |
Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck |
Matthew J. Busche, Michael R. Rice |
2017-11-28 |
| 9805965 |
Pixelated capacitance controlled ESC |
Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov |
2017-10-31 |
| 9753463 |
Increasing the gas efficiency for an electrostatic chuck |
— |
2017-09-05 |
| 9698041 |
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods |
Matthew J. Busche, Wendell Glenn Boyd, Jr., Michael R. Rice, Leon Volfovski |
2017-07-04 |
| 9685356 |
Substrate support assembly having metal bonded protective layer |
Kadthala Ramaya Narendrnath |
2017-06-20 |
| 9669653 |
Electrostatic chuck refurbishment |
Kadthala Ramaya Narendrnath |
2017-06-06 |
| 9668373 |
Substrate support chuck cooling for deposition chamber |
Brian T. West, Robert T. Hirahara, Dan DEYO |
2017-05-30 |
| 9666466 |
Electrostatic chuck having thermally isolated zones with minimal crosstalk |
Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. |
2017-05-30 |
| 9666467 |
Detachable high-temperature electrostatic chuck assembly |
— |
2017-05-30 |
| 9622375 |
Electrostatic chuck with external flow adjustments for improved temperature distribution |
Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono |
2017-04-11 |
| 9608549 |
Electrostatic chuck |
Steven V. Sansoni, Cheng-Hsiung Tsai |
2017-03-28 |
| 9580806 |
Method of processing a substrate support assembly |
Wendell Glen Boyd, Jr., Sehn Thach |
2017-02-28 |
| 9558981 |
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods |
Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2017-01-31 |
| 9536769 |
Pixelated capacitance controlled ESC |
Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov |
2017-01-03 |
