Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805965 | Pixelated capacitance controlled ESC | Reza Sadjadi, Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-10-31 |
| 9580806 | Method of processing a substrate support assembly | Vijay D. Parkhe, Sehn Thach | 2017-02-28 |
| 9536769 | Pixelated capacitance controlled ESC | Reza Sadjadi, Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-01-03 |