Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2017-07-04 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2017-01-31 |