Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706605 | Substrate support with feedthrough structure | Mayur Govind Kulkarni | 2017-07-11 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice | 2017-07-04 |
| 9698074 | Heated substrate support with temperature profile control | Nir Merry | 2017-07-04 |
| 9538583 | Substrate support with switchable multizone heater | Mayur Govind Kulkarni, Alex Minkovich, Michael R. Rice | 2017-01-03 |