Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831111 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Matthew J. Busche, Vijay D. Parkhe | 2017-11-28 |
| 9717147 | Electronic device manufacturing system | Jeffrey C. Hudgens | 2017-07-25 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Leon Volfovski | 2017-07-04 |
| 9587749 | Slit valve with a pressurized gas bearing | Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni +2 more | 2017-03-07 |
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Mayur Govind Kulkarni, Alex Minkovich | 2017-01-03 |