Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Mayur Govind Kulkarni, Michael R. Rice | 2017-01-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Mayur Govind Kulkarni, Michael R. Rice | 2017-01-03 |