Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706605 | Substrate support with feedthrough structure | Leon Volfovski | 2017-07-11 |
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Alex Minkovich, Michael R. Rice | 2017-01-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9706605 | Substrate support with feedthrough structure | Leon Volfovski | 2017-07-11 |
| 9538583 | Substrate support with switchable multizone heater | Leon Volfovski, Alex Minkovich, Michael R. Rice | 2017-01-03 |