Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698074 | Heated substrate support with temperature profile control | Leon Volfovski | 2017-07-04 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2017-02-07 |