Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842759 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| 9839976 | Annealing apparatus using two wavelengths of radiation | Dean Jennings, Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur +2 more | 2017-12-12 |
| 9739666 | Model based lamp background filtration of stray radiation for pyrometry | Kailash Kiran Patalay | 2017-08-22 |
| 9728471 | System for non radial temperature control for rotating substrates | Wolfgang Aderhold, Joseph M. Ranish | 2017-08-08 |
| 9673074 | In-situ temperature measurement in a noisy environment | Hanbing Wu, Anantha K. Subramani, Wei Wang | 2017-06-06 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9595459 | Managing thermal budget in annealing of substrates | Stephen Moffatt, Abhilash J. Mayur, Sundar Ramamurthy, Joseph M. Ranish | 2017-03-14 |
| 9579750 | Particle control in laser processing systems | Mehran Behdjat, Bruce E. Adams | 2017-02-28 |
| 9564349 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Blake Koelmel, Alexander Lerner +1 more | 2017-02-07 |
| 9557111 | Ambient laminar gas flow distribution in laser processing systems | Stephen Moffatt | 2017-01-31 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph R. Johnson, Joseph M. Ranish, John E. Gerling, Mathew Abraham, Aneesh Nainani | 2017-01-10 |