Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823573 | Correction of non-uniform patterns using time-shifted exposures | Christopher Dennis Bencher, Thomas Laidig | 2017-11-21 |
| 9791786 | Method to reduce line waviness | Christopher Dennis Bencher, Thomas Laidig | 2017-10-17 |
| 9754807 | High density solid state light source array | John E. Gerling, Joseph M. Ranish, Oleg V. Serebryanov | 2017-09-05 |
| 9721802 | LED based optical source coupled with plasma source | Subhash Deshmukh | 2017-08-01 |
| 9576810 | Process for etching metal using a combination of plasma and solid state sources | Subhash Deshmukh, Jingjing Liu, He Ren | 2017-02-21 |
| 9543172 | Apparatus for providing and directing heat energy in a process chamber | Joseph M. Ranish, John E. Gerling, Mathew Abraham, Aaron Muir Hunter, Aneesh Nainani | 2017-01-10 |