Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823573 | Correction of non-uniform patterns using time-shifted exposures | Joseph R. Johnson, Thomas Laidig | 2017-11-21 |
| 9798240 | Controlling photo acid diffusion in lithography processes | Peng Xie, Ludovic Godet | 2017-10-24 |
| 9791786 | Method to reduce line waviness | Joseph R. Johnson, Thomas Laidig | 2017-10-17 |
| 9748148 | Localized stress modulation for overlay and EPE | Ellie Yieh, Huixiong Dai, Srinivas D. Nemani, Ludovic Godet | 2017-08-29 |
| 9659771 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Pramit Manna, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim | 2017-05-23 |
| 9646642 | Resist fortification for magnetic media patterning | Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee, Matthew D. Scotney-Castle +2 more | 2017-05-09 |