Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847252 | Methods for forming 2-dimensional self-aligned vias | Srinivas D. Nemani, Mehul Naik | 2017-12-19 |
| 9761489 | Self-aligned interconnects formed using substractive techniques | Huixiong Dai, Yongmei Chen, He Ren, Mehul Naik | 2017-09-12 |
| 9659771 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Pramit Manna, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim, Christopher Dennis Bencher | 2017-05-23 |
| 9631278 | Metal silicide formation through an intermediate metal halogen compound | David Thompson | 2017-04-25 |
| 9613859 | Direct deposition of nickel silicide nanowire | Annamalai Lakshmanan, Kaushal K. Singh, Paul F. Ma, Mehul Naik, Andrew Cockburn +1 more | 2017-04-04 |