Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793108 | Interconnect integration for sidewall pore seal and via cleanliness | He Ren, Mehul Naik, Priyanka DASH, Bhaskar Kumar, Alexandros T. Demos | 2017-10-17 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2017-08-01 |
| 9659771 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Bencherki Mebarki, Pramit Manna, Li Yan Miao, Bok Hoen Kim, Christopher Dennis Bencher | 2017-05-23 |
| 9646876 | Aluminum nitride barrier layer | Srinivas Guggilla, Alexandros T. Demos, Bhaskar Kumar, He Ren, Priyanka DASH | 2017-05-09 |
| 9613908 | Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications | Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Alexandros T. Demos, Mukund Srinivasan | 2017-04-04 |
| 9580801 | Enhancing electrical property and UV compatibility of ultrathin blok barrier film | Xiaolan Ba, Weifeng YE, Mei-Yee Shek, Yu Jin, Li-Qun Xia +1 more | 2017-02-28 |
| 9570303 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Sung Hyun Hong, Bok Hoen Kim, Derek R. Witty | 2017-02-14 |