Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more | 2017-08-01 |
| 9570303 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Deenesh Padhi, Sung Hyun Hong, Bok Hoen Kim | 2017-02-14 |