Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Tersem Summan, Patrick Reilly +4 more | 2017-08-01 |
| 9659769 | Tensile dielectric films using UV curing | Bhadri N. Varadarajan, Sean Chang, James S. Sims, Guangquan Lu, David Mordo +2 more | 2017-05-23 |