Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2017-12-05 |
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Ziqing Duan, Kwangduk Douglas Lee, Abdul Aziz Khaja, Amit Kumar BANSAL, Bok Hoen Kim | 2017-07-18 |