Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816187 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2017-11-14 |
| 9711360 | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system | Ziqing Duan, Kwangduk Douglas Lee, Abdul Aziz Khaja, Bok Hoen Kim, Prashant Kumar Kulshreshtha | 2017-07-18 |
| 9593419 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more | 2017-03-14 |
| 9581807 | Supply independent and programmable non-resonant MEMS driver | Ravinder Singh, Meng-Tong Tan, Minkyu Je, Tal Langer | 2017-02-28 |