Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9816187 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2017-11-14 |
| 9698571 | Triggered arc flash arrester and shield element for use therewith | John J. Shea, Paul J. Rollmann, Robert K. Smith | 2017-07-04 |
| 9593419 | Wafer rotation in a semiconductor chamber | Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois, Kirby H. Floyd +2 more | 2017-03-14 |
| 9546541 | Gas lift valves | Chao Wang, Weng Keong Tiong, Yushan Li | 2017-01-17 |